[14p-PA13-1~21] 6.3 Oxide electronics

[14p-PA13-15] Preparation of CuYO₂ by sol-gel process and crystallinity dependence on preparation condition

〇Takashi Ehara^1,2, Marina Abe¹, Takayoshi Nakanishi¹, Kohei Sasaki¹ (1.Ishinomaki Senshu Univ., 2..)

Keywords:Sol-gel,CuYO2,Delaffossite

Delaffossite ternary oxide, CuYO₂ thin films were prepared on SiO₂ substrate through the sol-gel process. Copper and yttrium acetate were used as source, and 2-methoxethanol and 2- aminoethanol were used as solvent and chelating agent, respectively. Spin coated films were annealed under nitrogen flow. The film annealed at 800℃ for 10 h shows formation of c-axis oriented crystalline of CuYO₂. The condition in which c-axis oriented crystalline is formed is different from that of CuAlO₂.