The 76th JSAP Autumn Meeting, 2015

Presentation information

Poster presentation

9 Applied Materials Science » 9.5 New functional materials and new phenomena

[14p-PA5-1~11] 9.5 New functional materials and new phenomena

Mon. Sep 14, 2015 1:30 PM - 3:30 PM PA5 (Event Hall)

1:30 PM - 3:30 PM

[14p-PA5-10] Irradiation effect in the fabrication of Er2O3 film on the sputter-treated Si substrate

〇masaya fujita1,2, Hidehito Asaoka2, Kenji Yamaguchi2 (1.Ibaraki Univ., 2.Japan Atomic Energy Agency)

Keywords:ion beam,thin film,silicide