Thermal conductivity measurement of poly-Si films formed by flash lamp annealing

Presentation information

Poster presentation

CS Code-sharing session » CS4 9.4/16.2 Code-sharing session

Mon. Sep 14, 2015 1:30 PM - 3:30 PM PA6 (Event Hall)

1:30 PM - 3:30 PM

〇(D)Shunsuke Nishino¹, Takaki Nozawa¹, Seira Yamaguchi¹, Masanobu Miyata¹, Keisuke Ohdaira¹, Mikio Koyano¹ (1.JAIST)

Keywords:flash lamp annealing,3omega method,periodic nanostructure