The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-PA9-1~14] 6.2 Carbon-based thin films

Mon. Sep 14, 2015 4:00 PM - 6:00 PM PA9 (Event Hall)

4:00 PM - 6:00 PM

△ [14p-PA9-12] Fabrication of DLC Films with Different Characteristic Layers by Filtered Arc Deposition

〇Tooru Harigai1, Masafumi Yamano1, Yu Miyamoto1, Yuma Fujii1, Takahiro Imai1, Yoshiyuki Suda1, Hirofumi Takikawa1, Masao Kamiya2, Makoto Taki3, Yushi Hasegawa3, Nobuhiro Tsuji3 (1.Toyohashi Univ. of Tec., 2.Itoh Opt. Ind. Co., Ltd., 3.Onward Ceramic Coating Co., Ltd.)

Keywords:DLC,Filtered Arc Deposition