The 76th JSAP Autumn Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[14p-PA9-1~14] 6.2 Carbon-based thin films

Mon. Sep 14, 2015 4:00 PM - 6:00 PM PA9 (Event Hall)

4:00 PM - 6:00 PM

[14p-PA9-4] Dissociative excitation reaction of organosilanes in microwave discharge flow of Ar. – Optical emission spectroscopy under the radio-frequency biased conditions -

〇SYUNSUKE SAEKI1 (1.Nagaoka Univ. of Tech.)

Keywords:Hydrogenated amorphous silicon carbide