[14p-PA9-1~14] 6.2 Carbon-based thin films

[14p-PA9-7] Emission and Excitation spectrum of Laser irradiated a-CN_x

〇KAZUTOSHI IKEDA¹, Kazutoshi Fukui¹, Kohji Yamamoto², Ken-ichi Takarabe³, Shigeyuki Nakamura⁴, Kunio Itoh⁵, Shin-ichi Yamamoto⁵, Kazuya Uchishima⁵, Junji Sawahata⁶, Masaki Satake⁷ (1.Fac. of Engi., Univ. of Fukui, 2.FIR Center, Univ. of Fukui, 3.Fac. of Sci., Okayama Univ. Sci., 4.Tsuyama Nat. Col. Tech, 5.Fac. of Engi. , Ryukoku Univ, 6.Ibaraki Nat. Col. Tech, 7.Akashi Nat. Col. Tech)

Keywords:carbon nitride,amorphous,radio frequency sputtering