The 76th JSAP Autumn Meeting, 2015

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Poster presentation

7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14p-PB11-1~6] 7.6 Ion beams

Mon. Sep 14, 2015 6:30 PM - 8:30 PM PB11 (Shirotori Hall)

6:30 PM - 8:30 PM

[14p-PB11-6] Growth of c-axis tilted ScAlN films by oblique angle sputtering deposition

〇(PC)Masashi Suzuki1, Takahiko Yanagitani1 (1.Waseda Univ.)

Keywords:Oblique angle sputtering deposition,c-axis tilted ScAlN film