[14p-PB12-1~23] 15.4 III-V-group nitride crystals

[14p-PB12-13] Growth reaction in the chemical vapor deposition process of hexagonal boron nitride

〇Atsushi Masuda¹, Naoki Umehara², Takaki Shimizu¹, Tetsuya Kouno¹, Hiroko Kominami¹, Kazuhiko Hara^2,3 (1.Graduate school of Eng., Shizuoka Univ., 2.Graduate school of Sci. and Tech., Shizuoka Univ., 3.Res. Inst. of Electronics, Shizuoka Univ.)

Keywords:hexagonal boron nitride,CVD,thin films