[14p-PB8-1~3] 7.1 X-ray technologies

[14p-PB8-1] High efficiency diffraction grating overcoated with oxide film for 5-20nm region

〇Masato Koike¹, Nagano Tetsuya² (1.QuBS,JAEA, 2.Shimadzu Corp.)

Keywords:diffraction grating,soft X-ray,diffraction efficiency

Precise control of the boron (B) additive in an amount of a few ppm levels is indispensable in the steelmaking process. Further elucidation of the interaction with other elements is also interested. Recently authors have shown that the diffraction efficiency of the soft X-ray diffraction gratings used in emission spectroscopy for use for these purposes can be improved by the addition of a dense carbon film on it. It is indicated that the same effect can be obtained by well-known oxide-based films, e. g., TiO₂, and CeO₂, in the present report.