[15a-2J-1~8] 6.4 Thin films and New materials

▲ [15a-2J-7] Molecular Dynamics Simulation on Penetration of Fullerene in Thin-Film Ionic Liquid-Assisted Vacuum Deposition Process

〇(M2)Ida Prastiawan¹, Takeshi Nishimatsu¹, Yuji Higuchi¹, Nobuki Ozawa², Shingo Maruyama², Yuji Matsumoto², Momoji Kubo¹ (1.Institute for Material Research, Tohoku Univ., 2.Graduate School of Engineering, Tohoku Univ.)

Keywords:ionic liquid,thin film,molecular dynamics