[15a-2T-1~12] 17.4 Device applications

[15a-2T-3] Study of residues on CVD graphene in transfer process

〇Tomohiro Yasunishi¹, Yuya Takabayashi², Shigeru Kishimoto¹, Ryo Kitaura², Hisanori Shinohara², Yutaka Ohno³ (1.Dept. of Quantum Eng. Nagoya Univ., 2.Dept. of Chemistry Nagoya Univ., 3.EcoTopia Sci. Inst. Nagoya Univ.)

Keywords:Graphene,CVD,Transfer