[15a-2V-1~10] 8.2 Plasma measurements and diagnostics

[15a-2V-5] The influence of distribution of neutral beam energy by process pressure

〇Yasuaki Sakakibara¹, Yoshiyuki Kikuchi^1,2, Seiji Samukawa² (1.Tokyo Electron, 2.Tohoku Univ.)

Keywords:microwave plasma,neutral beam,surface reaction