Effect of Argon and Chlorine Plasma to GaN Films

Presentation information

Oral presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

Tue. Sep 15, 2015 9:00 AM - 11:30 AM 2V (234-1(South))

座長:佐々木浩一(北大)

10:30 AM - 10:45 AM

〇(M1)Yoshitsugu Banno¹, Daisuke Ogawa¹, Yoshitaka Nakano¹, Keiji Nakamura¹ (1.Chubu Univ.)

Keywords:Plasma-induced Damage,Photoluminescence,In-situ Monitoring