[15a-4A-1~11] 11.4 Analog applications and their related technologies

[15a-4A-7] Dependence of microwave characteristic and photoresponsivity on NbN film thickness in Spiral-MKIDs

〇Daiki Oka¹, Yuhei Ogawa¹, Kazuki Watanabe¹, Hironobu Yamada¹, Kensuke Nakajima¹, Seiichiro Ariyoshi², Shigetoshi Ohshima¹, Atsushi Saito¹ (1.Yamagata Univ., 2.Toyohashi Univ.)

Keywords:MKID,Broadband antenna,Spiral resonator

NbN製Spiral-MKIDsを作製し、マイクロ波特性及び光応答特性のNbN膜厚依存性を調査した。