[15a-4F-1~9] 6.2 Carbon-based thin films

[15a-4F-5] Relationship between optical constants and sp²/(sp²+sp³) or hydrogen contents of DLC films

〇(D)XiaoLong Zhou¹, Tunmee Sarayut¹, Tsuneo Suzuki¹, Kazuhiro Kanda², Hideki Nakajima³, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Hyogo of Univ., 3.SLRI)

Keywords:DLC films,optical constants,NEXAFS and ERDA

The chemical composition ((sp²/sp²+sp³) and hydrogen contents) and optical constants (refractive index (n) and extinction coefficient (k)) are used to classify the DLC films. The aim of this work is to study the relationship between chemical compositions and optical constants.