The 76th JSAP Autumn Meeting, 2015

Presentation information

Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.2 Education

[15a-PA1-1~30] 1.2 Education

Tue. Sep 15, 2015 9:30 AM - 11:30 AM PA1 (Event Hall)

9:30 AM - 11:30 AM

[15a-PA1-3] Mask-less Exposure Equipment for Education by Using a Commercially Available DLP Projector

〇Takenari Baba1, Yukihiro Kudoh2, Taiju Takahashi2 (1.Kogakuin Univ. Grad. School of Eng., 2.Kogakuin Univ.)

Keywords:Mask-less Exposure,DLP Projector

本研究では、DLPプロジェクターを用いて安価で教育用途でも使いやすいマスクレス露光装置を提案する。