[15a-PB2-1~19] 12.1 Fabrications and Structure Controls

[15a-PB2-6] Improvement of Operating Characteristics of OLED by the Suppression of Secondary Electron Bombardment during Sputter-deposition of Upper Electrode Film

〇Youichi Hoshi¹, Daichi Hamaguchi¹, Shin-ichi Kobayashi¹, Takayuki Uchida¹, Yutaka Sawada¹ (1.Tokyo Polytechnic University)

Keywords:organic light emitting diode,sputter-depopsition,low damage sputtering

We atempted to deposit the upper electrode films of OLED by using a low damage Facing Target Type Sputtering system. In this study, we investigated the effect of the sputter-deposition of upper electrode films on the operating characteristics of the OLED. As a results, it became clear that a suppression of secondary electron bombardment during the sputter-depopsition of the electrode film and optimizing the sputtering gas pressure lead to a significant improvement of the operating characteristics of the OLED, and OLED with better luminance efficiency than the OLED fabricated by evaporation was obtained.