[15a-PB3-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

▲ [15a-PB3-12] Magnetic properties in magnetron sputtering prepared ZnO:Mn thin films

〇Yu Zhang¹, Nao Nasu¹, Xinwei Zhao¹ (1.Tokyo Univ. of Sci.)

Keywords:diluted magnetic semiconductor,Mn-doped ZnO

Diluted magnetic semiconductors which are known as magnetic ions doped into semiconductors have become a hot topic because of their potential applications in spintronics. Among the DMSs, Mn-doped ZnO has attracted much attention since the theoretical prediction of room temperature ferromagnetic property of it by Dietl in 2000. Since then it has been difficult to achieve RTFM ZnO:Mn thin films and the mechanism of the ferromagnetism has also been an issue of debate. In this work, we prepared different magnetic ZnO:Mn thin films at 5K by rf magnetron sputtering.