The 76th JSAP Autumn Meeting, 2015

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Poster presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[15a-PB3-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

Tue. Sep 15, 2015 9:30 AM - 11:30 AM PB3 (Shirotori Hall)

9:30 AM - 11:30 AM

[15a-PB3-2] Preparation of BaSi2 thin-films by helicon-wave-plasma sputtering

〇(M1)Seiya Yokoyama1, Masami Mesuda2, Hideto Kuramochi2, Kaoru Toko1, Takashi Suemasu1,3 (1.Tsukuba Univ., 2.Tosoh., 3.JST-CREST.)

Keywords:silicide,helicon-wave-plasma