[15a-PB3-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

[15a-PB3-9] Effect of Annealing on Structural Properties of Silicon Implanted by Xenon-ion III

〇atsushi kitagawa¹, Hitoe Habuchi¹, Tamio Iida¹, Fumitaka Ohashi², Takayuki Ban², Tetsuji Kume², Shuichi Nonomura² (1.Natl. Inst. Technol., Gifu Coll, 2.Gifu Univ.)

Keywords:Si clathrate,ion implantation