[15a-PB4-1~9] 13.4 Si wafer processing /MEMS/Integration technology

[15a-PB4-4] Control of full width at half maximum of detection wavelength for wavelength-selective uncooled infrared sensors using two-dimensional plasmonic absorbers

〇SHIMPEI OGAWA¹, DAISUKE FUJISAWA¹, MASAFUMI KIMATA² (1.Mitsubishi Electric Corp., 2.Ritsumeikan Univ.)

Keywords:infrared