The 76th JSAP Autumn Meeting, 2015

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Poster presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[15a-PB4-1~9] 13.4 Si wafer processing /MEMS/Integration technology

Tue. Sep 15, 2015 9:30 AM - 11:30 AM PB4 (Shirotori Hall)

9:30 AM - 11:30 AM

[15a-PB4-7] Self-Alignment Vertical-Type Thin-Film Transistors (TFTs) with Transparent Oxide IGZO as Semiconductor

〇Fumiaki Kurihara1, Hiroyuki Okada1, Shigeki Naka1 (1.Univ. of Toyama)

Keywords:thin film transistor,self-alignment,vertical-type