The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Oral presentation

Joint Session K » 21.1 Joint Session K

[15p-1B-1~18] 21.1 Joint Session K

Tue. Sep 15, 2015 1:15 PM - 6:00 PM 1B (133+134)

座長:浦岡 行治(奈良先端大),神谷 利夫(東工大)

4:30 PM - 4:45 PM

△ [15p-1B-13] Improvement of NBTI and PBTI characteristics of C-doped In-Si-O TFT

〇(M2)Kazunori Kurishima1,2, Toshihide Nabatame2, Nobuhiko Mitoma2, Takio Kizu2, Kazuhito Tsukagoshi2, Tomomi Sawada2, Akihiko Ohi2, Ippei Yamamoto3,2, Tomoji Ohishi3, Toyohiro Chikyow2, Atsushi Ogura1 (1.Meiji Univ., 2.NIMS, 3.Shibaura Inst. Tech)

Keywords:C-doped In-Si-O TFT,NBTI,PBTI