The 76th JSAP Autumn Meeting, 2015

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Joint Session K » 21.1 Joint Session K

[15p-1B-1~18] 21.1 Joint Session K

Tue. Sep 15, 2015 1:15 PM - 6:00 PM 1B (133+134)

座長:浦岡 行治(奈良先端大),神谷 利夫(東工大)

5:30 PM - 5:45 PM

[15p-1B-17] Heating properties of a-InGaZnO TFTs with micro heaters

〇Shinnosuke Iwamatsu1, Yutaka Abe1, Toru Yahagi1, Mutsuto katoh1 (1.Yamagata res. inst. tech.)

Keywords:oxide semiconductor,micro heater,gas sensor