[15p-1B-1~18] 21.1 Joint Session K

[15p-1B-6] Important factors to determine optimum growth condition for amorphous oxide semiconductor thin-film transistors

〇Toshio Kamiya^1,2, Keisuke Ide¹, Hideya Kumomi², Hideo Hosono^1,2 (1.MSL Tokyo Tech, 2.MCES Tokyo Tech)

Keywords:amoprhous oxide semiconductor,thin-film transistor,optimum growth condition

The optimum growth condition for amorphous oxide semiconductor thin-film transistor will be discussed.