[15p-1B-1~18] 21.1 Joint Session K

[15p-1B-9] Microscopically-Patterned Electrochemical Doping to TiO₂ Thin Films

〇Takeaki Yajima¹, Tomonori Nishimura¹, Akira Toriumi¹ (1.The Univ. of Tokyo)

Keywords:oxide semiconductor,electrochemical doping

We demonstrated a technique of "electrochemical doping" as a convenient doping technique for oxide semiconductors. The electrochemical doping was applied to a typical oxide semiconductor TiO₂, showing the control of carier density, characterization of doping depth, and microscopic patterning of dopant distribution.