The 76th JSAP Autumn Meeting, 2015

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13 Semiconductors » 13.5 Semiconductor devices and related technologies

[15p-1C-1~18] 13.5 Semiconductor devices and related technologies

Tue. Sep 15, 2015 1:15 PM - 6:00 PM 1C (135)

座長:齋藤 真澄(東芝),入沢 寿史(産総研)

4:30 PM - 4:45 PM

[15p-1C-13] Electrical charactarization of thin InSb layer for monolithic 3D-IC

〇(M1)Masahiro Takahashi1,2, Sachie Fujikawa1, Hiroki Fujishiro1, Toshifumi Irisawa2, Junji Tominaga2, Tatsuro Maeda1,2 (1.Tokyo Univ. of Science, 2.AIST)

Keywords:semiconductor