[15p-1C-1~18] 13.5 Semiconductor devices and related technologies

[15p-1C-8] Fabrication and Comparative Study of Polycrystalline and Crystalline Silicon Channel FinFET CMOS Inverters

〇Yongxun Liu¹, Youhei Hori¹, Morifumi Ono¹, Takashi Matsukawa¹, Kazuhiko Endo¹, Shinichi Ouchi¹, Junichi Tsukada¹, Hiromi Yamauchi¹, Yuki Ishikawa¹, Wataru Mizubayashi¹, Yukinori Morita¹, Shinji Migita¹, Hiroyuki Ota¹, Meishoku Masahara¹ (1.AIST)

Keywords:FinFET,Inverter,Variability