3:00 PM - 3:15 PM
[15p-1E-5] Development of high-accuracy and high-speed four detector polarimeter
Keywords:polarimetry,ellipsometry,polarization
We have developed the high-accuracy and high-speed transmission-type four detector polarimeter (T-FDP). The maximum measurement speed of the T-FDP is less than 1 μs. The construction and the characteristics of a T-FDP is reported. Measurements of the polarization states as a practical application of the T-FDP to ellipsometry are also discussed.