[15p-1E-1~10] 3.8 Optical measurement, instrumentation, and sensor

[15p-1E-7] Improvement of resolution in birefringence profiler using polarization-diffractive gratings and imaging system

〇Ryohei Nakajima¹, Naoki Ohtani¹, Takashi Fukuda², Akira Emoto¹ (1.Doshisha Univ., 2.AIST)

Keywords:birefringence,polarization,nanoimprint