[15p-2C-1~23] CS2 3.11/13.7 Code-sharing session

[15p-2C-1] Investigation of Atomic Hydrogen Surface Cleaning for MBE Air-Hole Retained Growth.

〇(DC)Masaya Nishimoto^1,2, Kyohei Maekawa¹, Kenji Ishizaki¹, Kyoko Kitamura^1,3, Susumu Noda¹ (1.Kyoto Univ., 2.JSPS Research Fellow, 3.Kyoto Inst. of Tech.)

Keywords:photonic crystal,molecular beam epitaxy,semiconductor lasers

We have developed an MBE air-hole retained growth technique for fabrication of photonic-crystal lasers. We also revealed this regrowth technique has ability to control 3D air-hole shapes. In MBE air-hole retained growth technique, thermal cleaning step has to be performed at relatively low temperature to retain the photonic-crystal structure. In this reason, insufficiency of surface oxide desorption, which has possibility to reduce characteristics of photonic-crystal lasers, is feared. To address this issue, we investigate atomic hydrogen surface cleaning for oxide desorption at relatively low temperature.