[15p-2H-1~6] Recent Trend of Analysis Techniques for Functional Materials and Devices

[15p-2H-4] Evaluation of Next Generation Power Semiconductor Devises Using Super-Higher-Order Scanning Nonlinear Dielectric Microscopy and Proposal of Scanning Nonlinear Dielectric Potentiometry

〇Yasuo Cho¹, Norimichi Chinone¹, Kotaro Hirose¹, Kohei Yamasue¹ (1.Tohoku Univ.)

Keywords:scanning nonlinear dielectric microscopy (SNDM),super-higher-order SNDM,scanning nonlinear dielectric potentiometry

In this presentation, we introduce scanning nonlinear dielectric microscopy (SNDM), its extended version super-higher-order SNDM (SHO-SNDM) and SNDM based scanning nonlinear dielectric potentiometry (SNDP). Using these methods, we evaluate next generation power semiconductor devises and also observe the electrical interfacial state between graphene and SiC substrate.