The 76th JSAP Autumn Meeting, 2015

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[15p-2L-1~13] 6.1 Ferroelectric thin films

Tue. Sep 15, 2015 1:45 PM - 5:15 PM 2L (2F Lounge 2)

座長:藤沢 浩訓(兵庫県立大)

3:45 PM - 4:00 PM

△ [15p-2L-8] Growth of epitaxial orthorhombic HfO2-based films on Si substrate

〇Kiliha Katayama1, Takao Shimizu2, Takanori Kiguchi3, Akihiro Akama3, Konno Toyohiko3, Hiroshi Uchida4, Osami Sakata5, Hiroshi Funakubo1,2 (1.Tokyo Tech. IGS, 2.Tokyo Tech. MCES, 3.Tohoku Univ. IMR, 4.Sophia Univ. FST, 5.NIMS)

Keywords:ferroelectric,hafnia,orthorhombic