The 76th JSAP Autumn Meeting, 2015

Presentation information

Oral presentation

8 Plasma Electronics » 8.7 Plasma phenomena, emerging area of plasmas and their new applications

[15p-2Q-1~17] 8.7 Plasma phenomena, emerging area of plasmas and their new applications

Tue. Sep 15, 2015 1:45 PM - 6:15 PM 2Q (231-1)

座長:竹内 希(東工大),明石 治朗(防衛大)

5:30 PM - 5:45 PM

[15p-2Q-15] Time-Dependent Behavior of Silicon Nanowire Growth by Plasma Sputtering

〇chihiro takeshita1, Ikumi Yamada1, Eriguchi Koji1, Ono Kouichi1 (1.Kyoto Univ.)

Keywords:nanowire,sputtering