5:30 PM - 5:45 PM
[15p-2Q-15] Time-Dependent Behavior of Silicon Nanowire Growth by Plasma Sputtering
Keywords:nanowire,sputtering
Oral presentation
8 Plasma Electronics » 8.7 Plasma phenomena, emerging area of plasmas and their new applications
Tue. Sep 15, 2015 1:45 PM - 6:15 PM 2Q (231-1)
座長:竹内 希(東工大),明石 治朗(防衛大)
5:30 PM - 5:45 PM
Keywords:nanowire,sputtering