[15p-2S-1~14] 16.3 Bulk, thin-film and other silicon-based solar cells

△ [15p-2S-7] The Relation of AlO_x Passivation Film Structures and Fixed Charge Density

〇Sho Kitano¹, Yuki Miki¹, Koji Iguchi¹, Shohei Miki¹, Norihiro Ikeno², Yoshihiro Yamashita², Atsushi Ogura², Haruhiko Yoshida¹, Shin-ichi Satoh¹, Koji Maeda¹, Koji Arafune¹ (1.Univ. of Hyogo, 2.Meiji Univ.)

Keywords:Passivation,Fixed charge density