[15p-2U-2~11] 17.1 Growth technology

△ [15p-2U-7] Fabrication of Single-Layer MoS₂ Thin Film by Combination of Sputtering Deposition and Sulfurization Annealing using Organic Precursor

〇SEIYA ISHIHARA¹, YUSUKE HIBINO¹, NAOMI SAWAMOTO¹, KOHEI SUDA¹, TAKUMI OHASHI², KENTAROU MATSUURA², HIDEAKI MACHIDA³, MASATO ISHIKAWA³, HIROSHI SUDOH³, HITOSHI WAKABAYASHI², ATSUSHI OGURA¹ (1.Meiji Univ., 2.Tokyo Tech., 3.Gas-phase Growth Ltd.)

Keywords:Molybdenum disulfide,Sputtering deposition,Organic precursor