The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[15p-2V-1~22] 8.1 Plasma production and control

Tue. Sep 15, 2015 1:00 PM - 7:00 PM 2V (234-1(South))

座長:杤久保 文嘉(首都大),三沢 達也(佐賀大)

6:30 PM - 6:45 PM

▲ [15p-2V-21] Low Temperature Treatment using Atmospheric-Pressure Microwave Line Plasma

〇Haruka Suzuki1, Suguru Nakano1, Hitoshi Itoh2,3, Makoto Sekine1,2, Masaru Hori1,2, Hirotaka Toyoda1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ., 3.Tokyo Electron Ltd.)

Keywords:atmospheric-pressure plasma,microwave