The 76th JSAP Autumn Meeting, 2015

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[15p-2V-1~22] 8.1 Plasma production and control

Tue. Sep 15, 2015 1:00 PM - 7:00 PM 2V (234-1(South))

座長:杤久保 文嘉(首都大),三沢 達也(佐賀大)

2:30 PM - 2:45 PM

△ [15p-2V-7] Microwave Plasma Generation Using Cylindrical Cavity and Solid-State Amplifier

〇(M1)Yuichi Hasegawa1, Daisuke Ogawa1, Keiji Nakamura1, Soonam Park2, Satoru Kobayashi2, Hideo Sugai3 (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

Keywords:cylindrical cavity,solid-state,microwave plasma