4:45 PM - 5:00 PM
[15p-4C-11] Direct observation of temperature distribution in transferred AlGaN/GaN HEMTs on a copper plate by micro-Raman spectroscopy
Keywords:AlGaN/GaN,Transfer technique,Micro-Raman Spectroscopy
We transferred AlGaN/GaN HEMTs from sapphire substrate to copper plate by using h-BN release layer and Au-Au thermocompression bonding and found the enhancement of the heat dissipation improved the dc performance. In this study, we observed the temperature distribution in an active HEMT by micro-Raman spectroscopy. The estimated thermal resistance of 11.2 C mm/W was about half of that for the HEMT on sapphire.