The 76th JSAP Autumn Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[15p-4E-1~23] 7.2 Applications and technologies of electron beams

Tue. Sep 15, 2015 1:15 PM - 7:30 PM 4E (437)

座長:村田 英一(名城大),嶋脇 秀隆(八戸工大)

4:45 PM - 5:00 PM

[15p-4E-14] Simulation of Fogging Electron Trajectories in Scanning Electron Microscope

〇Taiki Nishino1, Kotera Masatoshi1 (1.OIT)

Keywords:SEM,simulation,fogging electron