Stability of Discharge Characteristics of Nanometer-order Size Transfer Mold Field Emitter Arrays for Plasma Source Applications

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

Tue. Sep 15, 2015 1:15 PM - 7:30 PM 4E (437)

座長:村田英一(名城大),嶋脇秀隆(八戸工大)

7:00 PM - 7:15 PM

〇JONGHYUN MOON¹, Masayuki Nakamoto¹ (1.Shizuoka Univ.)

Keywords:Transfer Mold field emitter arrays,Discharge characteristics,Plasma applications