The 76th JSAP Autumn Meeting, 2015

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[15p-4E-1~23] 7.2 Applications and technologies of electron beams

Tue. Sep 15, 2015 1:15 PM - 7:30 PM 4E (437)

座長:村田 英一(名城大),嶋脇 秀隆(八戸工大)

2:30 PM - 2:45 PM

[15p-4E-6] Observation of pn Junctions in Semiconductors using Fountain Detector

〇Takashi Sekiguchi1, Hideo Iwai1, Takashi Kimura1 (1.NIMS)

Keywords:pn junction,Fountain detector,SEM

We have recently developed low-pass secondary electron detector for SEMs and named “Fountain Detector”. This detector is composed of bias grid above and electron detector below the specimen. Using this LPSED, we have observed pn junctions in semiconductors.