The 76th JSAP Autumn Meeting, 2015

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Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.1 Interdisciplinary and General Physics

[15p-PA2-1~1] 1.1 Interdisciplinary and General Physics

Tue. Sep 15, 2015 4:00 PM - 6:00 PM PA2 (Event Hall)

4:00 PM - 6:00 PM

[15p-PA2-1] ta-C film damage of deep ultraviolet irradiation in Oxygen atmosphere

〇TOMOMI KOZU1,3, MAKOTO YAMAGUCHI2, MASAHIRO KAWAGUCHI4, KEN NISHIDA3 (1.Renishaw KK, 2.Akita Univ., 3.NDA, 4.TIRI)

Keywords:deep ultraviolet,Raman spectroscopy,amorphous carbon

Deep ultraviolet (DUV) excited Raman spectroscopy is useful for ta-C (Tetrahedral Amorphous Carbon) film evaluation because it can observe sp3 bond directly. But then the ta-C film has damage due to irradiation of DUV light. In this presentation, we show the DUV irradiation damage of ta-C in Oxygen atmosphere.