The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster)

[15p-PB2-1~53] 8 Plasma Electronics（Poster)

Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)

6:30 PM - 8:30 PM

[15p-PB2-31] Surface Roughness Control of VHF-DC Superimposed Magnetron Sputtering

〇Takashi Fukui1, Taku Suyama1, Yushi Fukuoka1, Kensuke Sasai1, Hirotaka Toyoda1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ.)

Keywords:sputter