[15p-PB2-1~53] 8 Plasma Electronics（Poster)

[15p-PB2-33] Formation of carbon needle-like crystals by plasma CVD

〇(M1)Masashi Futamura¹, Masaya Tajima¹, Yoshimi Horio¹ (1.Daido Univ.)

Keywords:plasma,carbon

It is attempted to from a carbon needle-like crystals as filed emission material by using a plasma CVD. Methane and argon gas mixture is flowed into a plasma CVD. Palladium deposited glasses were used as the substrate. We found that many spherical and needle crystals are formed on the substrate. This suggests a potential as tip materials for field emission source.