[15p-PB2-1~53] 8 Plasma Electronics（Poster)

[15p-PB2-4] Silicon substrate temperature measurement in high-power impuls magnetron sputtering using non-contact type optical interferometry

〇(M1)Katsuhiro Hattori¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Tech., 3.Nagoya Univ.)

Keywords:Substrate temperature measurement,HiPIMS