The 76th JSAP Autumn Meeting, 2015

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Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster)

[15p-PB2-1~53] 8 Plasma Electronics（Poster)

Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)

6:30 PM - 8:30 PM

[15p-PB2-41] Preparing of functional thin films by plasma process using multi-elements targets

〇Hiroharu Kawasaki1, Tamiko Ohshima1, Yoshihito Yagyu1, Takeshi Ihara1, Yoshiaki Suda1 (1.Nat'l Inst. Tech. Sasebo Col.)

Keywords:Plasma Process,Powder targets