The 76th JSAP Autumn Meeting, 2015

Presentation information

Print

Poster presentation

8 Plasma Electronics » 8 Plasma Electronics（Poster)

[15p-PB2-1~53] 8 Plasma Electronics（Poster)

Tue. Sep 15, 2015 6:30 PM - 8:30 PM PB2 (Shirotori Hall)

6:30 PM - 8:30 PM

[15p-PB2-51] Decomposition of chlorosilane source by hydrogen radical generated by inductively coupled plasma

〇(M1)Daiki Tsutsumi1,2, Yuji Okamoto2,3, Takamasa Ishigaki1, Masatomo Sumiya2 (1.Hosei Univ., 2.NIMS, 3.Tsukuba Univ.)

Keywords:plasma