[15p-PB2-1~53] 8 Plasma Electronics（Poster)

[15p-PB2-53] Irradiation Effect of Oxygen Plasma on TiO2 Thin Films

〇Masahito Niibe¹, Yuma Araki¹, Noritaka Takehira¹, Retsuo Kawakami², Yoshitaka Nakano³, Chisato Azuma² (1.Univ. of Hyogo, 2.Tokushima Univ., 3.Chubu Univ.)

Keywords:Plasma damage,Dye decomposition rate,Oxygen vacancy